| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9670364 | Microelectronic Engineering | 2005 | 5 Pages |
Abstract
These results presented in this paper clarify the role of individual process steps during the barrier deposition.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
J.-P. Jacquemin, E. Labonne, C. Yalicheff, E. Royet, P. Vannier, R. Delsol, P. Normandon,