Article ID Journal Published Year Pages File Type
9670559 Microelectronic Engineering 2005 7 Pages PDF
Abstract
Electrocapillary force can be used to displace a mercury droplet confined in microfluidic channels. When the plug is moved into an area of a thin membrane of low Young's module, the surface tension of the confined mercury droplet provides a force to deform the membrane. We show that this effect, together with the electrocapillary force controlled movement, can be used for the actuation of microfluidic elements. We applied this technique to micro valves obtained by using multilayer soft-lithography techniques. Fabrication of integrated microelectrodes as well as single and multiple mercury plugs using microfluidic techniques has also been shown, thereby providing a set of technology for more detailed investigations.
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Physical Sciences and Engineering Computer Science Hardware and Architecture
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