Monte-Carlo simulation of low-energy electron scattering in PMMA - using stopping powers from dielectric formalism

The scattering processes of low-energy (E ⩽ 10 keV) electrons in a bulk PMMA have been simulated using a Monte-Carlo approach. The approach utilized the continuous slowing down approximation, based on the Mott cross-section for elastic scattering of electron. In addition, the stopping powers from Bethe equation modified by Joy and Luo and those from dielectric response theory with exchange were used, respectively, for the energy losses of electrons. Using these two different stopping powers, the differences between the simulated results, such as electron backscattering coefficients, energy distributions of backscattered electrons and energy dissipations in PMMA, have been determined.