| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9670656 | Microelectronic Engineering | 2005 | 5 Pages |
Abstract
A new reticle is designed that takes advantage of the high value of thermal conductivity of diamond to add a layer of diamond film to the bottom of traditional pellicle-reticle; that is, the new reticle replaces the pellicle with a diamond material. This method may help maintain the future manufacturing process of photo-lithography below 35 nm and can improve the problem of slightly out of shape reticle caused by the long-term effects of light and thermal energy.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Yang-Kuao Kuo, Chuen-Guang Chao,