| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 9670662 | Microelectronic Engineering | 2005 | 11 Pages |
Abstract
The method has been successfully applied in the fabrication of several types of diffractive elements, including micro-Fresnel lens arrays, phase sampling filters and diffraction gratings on quartz and GaAs wafers. The diffraction efficiencies of these elements were found to be up to 92%. The lens exhibited diffraction-limited focusing characteristics and an insignificant wave front aberration (rms 0.01λ).
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Authors
A. Kowalik, K. Góra, Z. Jaroszewicz, A. KoÅodziejczyk,