Article ID Journal Published Year Pages File Type
4970851 Microelectronic Engineering 2017 7 Pages PDF
Abstract
Observation of composition dependent dipole-induced flatband voltage (Vfb) shift at Al2O3/AlFxOy interface and process dependent dipole-induced Vfb shift at MgO/Al2O3 interface.253
Keywords
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Opportunity of dipole layer formation at non-SiO2 dielectric interfaces in two cases: Multi-cation systems and multi-anion systems
Authors
, ,