Article ID Journal Published Year Pages File Type
540331 Microelectronic Engineering 2012 5 Pages PDF
Abstract

In this study, the temperature dependence of the dielectric properties, conductivity and resistivity of metal–insulator-semiconductor (MIS) structures have been investigated using capacitance (C) and conductance (G/ω) measurements in wide temperature range of 120–400 K at 1 MHz. Calculation of the dielectric constant (ε′), dielectric loss (ε″), loss tangent (tan δ), ac conductivity (σac), ac resistivity (ρac) and the real and imaginary parts of electric modulus (M′ and M″) were given in the studied temperature range. The values of the ε′, ε″ and σac increase exponentially with the increasing temperature between 280 K and 400 K. On the other hand, these values remain almost constant between 120 K and 240 K. In addition, the experimental dielectric data have been analyzed by considering electric modulus formalism. The ln σac vs. 1000/T plot shows two linear regions with different slopes which correspond to low (120–240 K) and high (280–400 K) temperature ranges. The values of activation energy for two different conduction mechanisms were found as 4 meV and 201 meV for low and high temperature ranges, respectively.

Graphical abstractLn σac versus 1000/T plot shows two linear regions with two different slopes which correspond to region 1 (120–240 K) and region 2 (280–400 K).Figure optionsDownload full-size imageDownload as PowerPoint slide

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
, , ,