Moore’s crystal ball: Device physics and technology past the 15 nm generation

This paper will discuss advanced CMOS transistor architectures for the 15 nm node and beyond. Transistor architectures such as ultra-thin body (UTB), FinFET (and related architectures such as Trigate, Omega-FET, Pi-FET), and nanowire device architectures will be compared and contrasted. Key technology challenges (such as mobility, resistance and capacitance) shared by all the architectures will be discussed in relation to recent research results. The impact of new transistor architectures on the progression of Moore’s Law will be summarized.

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