Fabrication and properties of PZT micro cantilevers using isotropic silicon dry etching process by XeF2 gas for release process Fulltext Access 7 Pages 2005
Development of a novel high precision piezoelectric linear stepper actuator Fulltext Access 7 Pages 2005
A high precision ultrasonic docking system used for automatic guided vehicle Fulltext Access 7 Pages 2005
Measurement for fracture toughness of single crystal silicon film with tensile test Fulltext Access 7 Pages 2005
Design and evaluation of linear ultrasonic motors for a cardiac compression assist device Fulltext Access 7 Pages 2005
Design of a capacitive-sensor signal processing system with high accuracy and short conversion time Fulltext Access 7 Pages 2005
Temperature-controlled fiber Bragg grating dynamic strain detection system Fulltext Access 7 Pages 2005
Athermal fibre Bragg grating strain gauge with metal coating in measurement of thermal expansion coefficient Fulltext Access 7 Pages 2005
New implementation of high-precision and instant-response air thermometer by ultrasonic sensors Fulltext Access 7 Pages 2005
Screen-printed piezoelectric ceramic thick films with sintering additives introduced through a liquid-phase approach Fulltext Access 7 Pages 2005
Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes Fulltext Access 7 Pages 2005
Inherently conducting polymer modified polyurethane smart foam for pressure sensing Fulltext Access 7 Pages 2005
PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow Fulltext Access 7 Pages 2005
Preliminary investigation of KTN as a surface acoustic wave infrared/thermal detector Fulltext Access 7 Pages 2005
A differential charge-transfer readout circuit for multiple output capacitive sensors Fulltext Access 7 Pages 2005
Optimal design of piezoelectric transformer for high efficiency and high power density Fulltext Access 7 Pages 2005
Strain-induced martensitic transformation in fatigue crack tip zone for a high strength steel Fulltext Access 7 Pages 2005
X-ray photoelectron spectroscopy studies of indium tin oxide nanocrystalline powder Fulltext Access 7 Pages 2005
Characterization of microstructural phases of steels by sound velocity measurement Fulltext Access 7 Pages 2005
High temperature deformation of friction stir processed 7075 aluminium alloy Fulltext Access 7 Pages 2005
A technique for the removal of oxides from the fracture surfaces of HAYNES® 230® alloy Fulltext Access 7 Pages 2005
The structural defects and UV-VIS spectral characterization of TiO2 particles doped in the lattice with Cr3+ cations Fulltext Access 7 Pages 2005
Influence of secondary carbides precipitation and transformation on hardening behavior of a 15 Cr-1 Mo-1.5 V white iron Fulltext Access 7 Pages 2005
Modeling and design of composite free-free beam piezoelectric resonators Fulltext Access 7 Pages 2005
Material nonlinear characteristics of the 3203HD PZT wafer under high electric fields Fulltext Access 7 Pages 2005
Distributed measurement system based on networked smart sensors with standardized interfaces Fulltext Access 7 Pages 2005
Acoustic near-field technique for characterization of bitumen and polymer processing Fulltext Access 7 Pages 2005
Nonlinear mechanical effects in silicon longitudinal mode beam resonators Fulltext Access 7 Pages 2005
Single flexible ultrasound transducer for enhancement of permeability of silicone membrane Fulltext Access 7 Pages 2005
Fracture strength, elastic modulus and Poisson's ratio of polycrystalline 3C thin-film silicon carbide found by microsample tensile testing Fulltext Access 7 Pages 2005
A new excimer laser micromachining method for axially symmetric 3D microstructures with continuous surface profiles Fulltext Access 7 Pages 2005
Stress control in masking layers for deep wet micromachining of Pyrex glass Fulltext Access 7 Pages 2005
Simulation of shaped comb drive as a stepped actuator for microtweezers application Fulltext Access 7 Pages 2005
Carbon nanotubes and other fullerenes produced from tire powder injected into an electric arc Fulltext Access 7 Pages 2005
Cryogenic deformation microstructures of 32Mn-7Cr-1Mo-0.3N austenitic steels Fulltext Access 7 Pages 2005
Mechanical properties of WC/Co cemented carbide with larger WC grain size Fulltext Access 7 Pages 2005
Comparative study of spin coated and sputtered PMMA as an etch mask material for silicon micromachining Fulltext Access 7 Pages 2005
Development of Tactile Mapping system for the stiffness characterization of tissue slice using novel tactile sensing technology Fulltext Access 7 Pages 2005
Adaptation of the near-field acoustic sensor to the measurement of the media properties Fulltext Access 7 Pages 2005
Electrochemical deposition of Cu and Ni/Cu multilayers in Si Microsystem Technologies Fulltext Access 7 Pages 2005
A new latched 2Â ÃÂ 2 optical switch using bi-directional movable electrothermal H-beam actuators Fulltext Access 7 Pages 2005
An alternative method to separate and analyse the microtextures and microstructures of primary alpha grains and transformed beta grains in near-α titanium alloy Timetal 834 Fulltext Access 7 Pages 2005
A simple lumped electrical model for an RF MEMS switch considering lossy substrate effects Fulltext Access 7 Pages 2005
Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning Fulltext Access 7 Pages 2005
A dynamically driven micro mirror array as the encoding mask in a Hadamard transform spectrometer (HTS) Fulltext Access 7 Pages 2005
A portable multi-sensor data-logger for medical surveillance in harsh environments Fulltext Access 7 Pages 2005
Silicon microneedle electrode array with temperature monitoring for electroporation Fulltext Access 7 Pages 2005
Bipolar magnetic microsensor for longitudinal and transversal magnetic fields Fulltext Access 7 Pages 2005
A novel microacoustic viscosity sensor providing integrated sample temperature control Fulltext Access 7 Pages 2005
Production processes for a flexible retina implant (Eurosensors XVIII, Session C6.6) Fulltext Access 7 Pages 2005
Integrating micromachined fast response temperature sensor array in a glass microchannel Fulltext Access 7 Pages 2005
Low cost PCB thermal sigma-delta air flowmeter with improved thermal isolation Fulltext Access 7 Pages 2005
Hysteresis and creep compensation for piezoelectric actuator in open-loop operation Fulltext Access 7 Pages 2005
A thermal bimorph micromirror with large bi-directional and vertical actuation Fulltext Access 7 Pages 2005
Self-diagnostic high-density silicon microprobe arrays fabricated by the corner compensated anisotropic etching of (1Â 1Â 0) silicon wafers Fulltext Access 7 Pages 2005
Piezoelectric properties of Fe2O3-doped (1 â x)BiScO3-xPbTiO3 ceramics Fulltext Access 7 Pages 2005
Impedance-based response of an electrolytic gas bubble to pressure in microfluidic channels Fulltext Access 7 Pages 2005
Strain measurement in a Mach-Zehnder fiber interferometer using genetic algorithm Fulltext Access 7 Pages 2005
In situ thermal diagnostics of the micro-PCR system using liquid crystals Fulltext Access 7 Pages 2005
Design consideration and fabrication of a microchannel system containing a set of heaters and an array of temperature sensors Fulltext Access 7 Pages 2005
Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation Fulltext Access 7 Pages 2005
Linearization of the scanning field for 2D torsional micromirror by RBF neural network Fulltext Access 7 Pages 2005
A continuous cell separation chip using hydrodynamic dielectrophoresis (DEP) process Fulltext Access 7 Pages 2005
Properties of 310S stainless steel coatings produced by unbalanced magnetron sputter deposition Fulltext Access 7 Pages 2005
Microscopic observation of cold-deformed Al-4Cu-Mg alloy samples after semi-solid heat treatments Fulltext Access 7 Pages 2005
Characterization of FeS2-pyrite thin films synthesized by sulphuration of amorphous iron oxide films pre-deposited by spray pyrolysis Fulltext Access 7 Pages 2005
Microstructural research on hot strips of low carbon steel produced by a compact strip production line under different thermal histories Fulltext Access 7 Pages 2005