Integrating micromachined fast response temperature sensor array in a glass microchannel

Total glass microdevices have attracted wide interest in the development of micro total analysis systems (μTAS), laser microsurgery, micro heat pipes and microfluidics researches because of the possibility for optical diagnostics and observations. The integration of a detection system, such as integrated sensors into a glass microchannel, however, was difficult due to technology constraints. A microfabrication process integrating a micromachined fast response temperature sensor array inside a glass microchannel is presented. Combining of newly developed two different glass materials anodic bonding, channel etching, fabrication of silicon temperature detectors, makes the fabrication of a glass microchannel with an integrated temperature detector array possible. The implantation process and the channel etching technology were ameliorated to adapt to the new material introduced. The dynamic response of the integrated temperature array has also been calibrated. The response time of the integrated temperature sensor array was examined to be 1.5 μs in the glass microchannel.