Degradation evaluation of poly-Si TFTs by comparing normal and reverse characteristics and behavior analysis of hot-carrier degradation

► We evaluate degradation of poly-Si TFTs by comparing normal and reverse characteristics. ► Symmetrical normal and reverse characteristics indicate Joule-heating degradation. ► Asymmetrical characteristics indicate hot-carrier degradation. ► Degradation occurrence is contrasted between standard and fine TFTs. ► Behavior of the hot-carrier degradation is analyzed.