Effects of thermal annealing on the semi-insulating properties of radio frequency magnetron sputtering-produced germanate thin films

► Effects of thermal annealing on the properties of germanate thin films are studied. ► Electrical and physical characterizations are presented. ► Leakage current in the accumulation region can be increased by the annealing process. ► Influence of leakage on the accumulation capacitance was also established. ► Decrease of dielectric constant in presence of crystalline nanoparticles was shown.