کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
11023609 1701263 2018 27 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
MEMS-based particle detection system for measuring airborne ultrafine particles
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
MEMS-based particle detection system for measuring airborne ultrafine particles
چکیده انگلیسی
A MEMS-based particle detection system which includes a particle processing chip and electronic circuits was developed for low-cost and ubiquitous monitoring of airborne ultrafine particles. The detection system consists of particle classification, charging, precipitation, and sensing sections. Particles with different sizes enter the ultrafine particle processing chip and are separated according to their sizes in the classification section. Size-classified particles are charged in the charging section. Then, the mean size and particle concentrations are determined in the precipitation and sensing sections. The particle classification, charging, and precipitation sections were integrated on a single chip using MEMS and microfluidic technologies. The particle sensing section was realized using a metal filter connected to a high-precision electrometer. The characteristics of each section were first analyzed, and the proposed particle detection system was then compared with standard commercially available instruments. The calculated particle number concentrations correspond to the results measured by commercially available instruments. The proposed particle detection system can be applied for monitoring of ultrafine particles with size range of 20-300 nm (20-130 nm particle mean diameter) and concentration range of 320-106 particles/cm3.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 283, 1 November 2018, Pages 235-244
نویسندگان
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