Tuning electromechanical response of individual CNT by selective electron beam induced deposition

Carbon nanotubes have been recognized as one of the most promising materials for developing nanoelectromechanical systems. In particular, the electron beam induced deposition (EBID) process of amorphous carbon under scanning electron microscopy (SEM) represents a very well known and suitable technique for the realization of a stable mechanical and electrical contact between CNTs and the supporting material. Within this context, the effect of the EBID process on the electromechanical response of an individual multiwalled CNT was directly investigated by using a piezoelectric nanomanipulation system operating inside an SEM chamber. The experimental system ensures a high control capability on the geometric parameters of the as fabricated cantilevered CNT based structure, thus allowing a precise modelization of the electrostatic CNT deflection process. The amorphous carbon coating was found to produce a variation of the mechanical response of the CNT cantilevered system, suggesting the use of EBID under SEM as an effective method for tuning the electromechanical properties of single CNT based nanostructures.