Taper array in silica glass for beam splitting

• Taper array was realized by water-assisted femtosecond laser direct writing.
• The size of the tapers could be controlled by using heat treatment.
• The taper array as a beam splitter in silica glass are uniform and smooth.

We proposed taper array in silica glass for beam splitting which was fabricated by water-assisted femtosecond laser direct writing technology and the subsequent heat treatment. We divided the array into many fabricating cells which were executed automatically in sequences as specified by the program that contained the information for the three-dimensional stage movements. Each cell could fabricated a rectangular cylinder. The size and distribution of the rectangular cylinder could be controlled by adjusting the position of the fabricating cells. Then the heat treatment should be used to reshape the rectangular cylinders into taper array. The experimental results show that the taper periodic microstructures in silica glass are uniform and smooth, and the tapers can divide the incident light into beam array. The results demonstrated that the combination of the water-assisted femtosecond laser direct writing technology and the heat treatment is accessible and practical for the high quality micro-optical elements. These micro-optical elements will have potential applications in fluorescence detection and beam splitter.