Ru nanodot synthesis using CO2 supercritical fluid deposition

► Ruthenium nanostructures were synthesized on Si substrate and HfO2 film using CO2-based supercritical fluid deposition (SCFD). ► The size and distribution of ruthenium nanodots were controlled by the weight of Ru precursor and substrate temperature. ► Elevated temperature made an enlargement of Ru nanodot diameter. ► MIS device embedded Ru nanodots exhibited the hysteresis characteristics with flat band voltage of 0.5 V.