Fabrication and characteristics of Ba(Zr0.1,Ti0.9)O3 thin films on glass substrate

This paper reports on the characteristics of perovskite Ba(Zr0.1,Ti0.9)O3 (BZT) ferroelectric films on ITO glass substrate. The deposition rate and surface roughness of thin films were measured and calculated to be about 3.4 nm/min and 4.85 nm, respectively, from the SEM cross-sectional and AFM images. Further, the dielectric constant and leakage current density were about 130 and 5×10−8 A/cm2, as the substrate temperature was 550 °C.