Magnetic properties of (Co92Zr8/SiO2)15 multilayer thin films for GHz applications

• (Co92Zr8/SiO2)15 magnetic/dielectric thin films were deposited with sputtering.
• The microwave properties can be tailored by the thickness of interlayers.
• Damping coefficients α increased with the interlayer thickness increasing.

In this work, the static and microwave magnetic properties of (Co92Zr8/SiO2)15 multilayer thin films were investigated. The in-plane uniaxial anisotropy field can be tailored from 120 to 170 Oe by adjusted the thickness of SiO2 from 10 to 1 nm, and the resonance frequency can be tailored from 3.47 to 3.87 GHz correspondingly. This work provided a kind of magnetic/dielectric multilayer thin films with adjustable magnetic properties for microwave application.