Highly conductive and damp heat stable transparent ZnO based thin films for flexible electronics

► Highly conductive and transparent AZO composition was explored by CCS method. ► The optimized composition was 3.13 wt.% Al doped ZnO deposited at room temperature. ► Resistivity was 6.5 × 10−4 Ω cm and average transmittance was 92% in visible region. ► In the damp heat test, the sheet resistance does not change even after 1000 h.