Effect of the nanostructure on room temperature ferromagnetism and resistivity of undoped ZnO thin films grown by chemical vapor deposition

Undoped zinc oxide thin films having various types of morphology and nanostructure were deposited by metal organic chemical vapor deposition (MOCVD) on single-crystalline substrates. Water-assisted MOCVD process at low temperatures (300–500 °C) was applied along with conventional MOCVD in oxygen-containing atmosphere at 500 and 600 °C. The strong correlation between room-temperature ferromagnetism of the films, their electrical properties and morphology at nano-scale was demonstrated.