Creation of surface nanostructures in Al2O3 by slow highly charged ions

Al2O3 single crystals were irradiated with slow highly charged Xe ions of various charge states from an EBIT (Electron Beam Ion Trap) source at the Dresden two source facility. The irradiations were performed at room temperature and under normal incidence. Scanning force microscopy (SFM) was utilized to investigate the topography of the irradiated surfaces. The measurements showed that above a potential energy threshold, each ion creates a nanohillock protruding from the surface. These structures are compared to those created by swift heavy ions (SHI). The results are discussed in terms of potential energy deposition of highly charged ions (HCI) and electronic energy loss of SHI.