کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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1686227 | 1010590 | 2011 | 4 صفحه PDF | دانلود رایگان |
Depth resolution of time-of-flight ERDA using a 4He beam (He TOF-ERDA) has been studied. The measurement system consists of a time detector of the ion transmission type and a silicon surface-barrier detector. Depth resolution was measured using samples of carbon layers on silicon wafers and 4He beams with energies between 3.5 and 10.1 MeV. The depth resolution of 6.0 ± 1.6 nm (FWHM) was obtained with a 3.5 MeV 4He incident beam. The measured depth resolution agreed with that evaluated by a calculation. Comparison with other methods such as heavy ion (HI) TOF-ERDA, resonant elastic scattering and nuclear reaction analysis (NRA) was performed. Depth resolution obtained by He TOF-ERDA is superior to that by NRA or resonant elastic scattering, and comparable to that by HI TOF-ERDA.
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 269, Issue 9, 1 May 2011, Pages 1019–1022