Study on plasma discharge parameters in double-glow plasma surface alloying furnace

Double Langmuir probe technique was used for plasma diagnostics of discharge process in double-glow plasma alloying furnace. Investigated that the effect of changes of voltage of the source pole and air pressure on plasma parameters. Results show that plasma density increases, electron temperature decreases and potential of the probe decreases, with the rise of voltage of the source pole under condition of fixed cathode potential and fixed air pressure. During increasing of air pressure in furnace, electron temperature decreases and probe potential increases. The change of probe potential is smart at start of the measuring and probe potential goes to stabilization only when degas process goes to finishing.