Microfluidic Balancing Concepts for Ultraprecision High Speed Applications

High-speed, ultraprecise air-bearing spindles require accurate balancing in order to minimize vibrations and achieve an optimum surface quality in diamond machining. In this paper, novel concepts for balancing of aerostatic spindles based on microfluidic pumps and valves are being investigated. Conventional, manual balancing methods are usually time-consuming and lack the required accuracy for ultraprecision High Performance Cutting (HPC). Using remotely controlled micropumps and -valves, minimum amounts of a few nanoliters of a fluid (e.g. water, oil) can be handled, allowing shifts of the center of mass two orders of magnitude more precise than those achieved with conventional balancing operations. Thus, a remote-controlled and automated balancing process is possible.