Study of Micro Groove Machining by Micro ECM

Micro ECM has the ability to generate the micro features such as micro holes, 3D micro cavities in electrically conductive materials. In this study, the influence of parameters (voltage, on-time and frequency of pulse generator, electrolyte flow, etc.) on the machining performance such as material removal rate (MRR) and accuracy on micro groove machining by micro ECM are investigated. Total of 19 grooves were machined on a self-made micro ECM equipment using a nanosecond pulse generator. Experimental results were recorded and analyzed. It was found that the corner radius and the taper between the sidewall and the bottom surface of a groove vary with the voltage and pulse on-time, the frequency of pulse, electrolyte system besides of the MRR and surface roughness. The electrolyte system with double nozzle is proposed to shorten the geometrical deviation such as the corner and the taper of the right and left sidewall of a groove. The results are analyzed.