Experimental Study of Laser Etching on Al2O3-SiC Composite Ceramics

Analyze the composition of micro area of the laser etched surface via X-Ray Energy Dispersive Spectrometer, and by analyzing the elemental change rule of Al2O3-SiC composite ceramics, study the removal mechanism of laser direct etching on Al2O3-SiC composite ceramics, and compare with composite etching of water jet and laser. The results show that: In the process of laser direct etching, Al2O3 mainly happens the molten removal, a large number of tiny molten particles concentrate the etched surface, so the content of aluminum is increased, but for SiC, because of the decomposition needs a more laser energy, so the SiC has a little decomposition. In the process of composite etching of water jet and laser, water jet with certain pressure can wash a lot of molten particles of Al2O3, reducing the accumulation of molten particles of Al2O3, the content of aluminum is decrease, the content of silicon is increased relatively.