A study of relationship between laser intensity and scanning frequency in MEMS scanning system

• We established a MEMS scanning interferometer system.
• Analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity.
• Simulated the periodic variation of laser intensity in different MEMS scanning frequency.
• Using MEMS scanning interferometer system get the periodic variation of laser intensity in different MEMS scanning frequency.
• Analyzed some special cases appeared in MEMS vibration.

The periodic variation of laser intensity in MEMS scanning interferometer system is one of the most important factors which influence the interferometer performance. In this paper, we analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity, by simulation and experiment, get the conclusion of that: in MEMS scanning interferometer system, the slow axis vibration frequency of MEMS scanning device determines the received laser intensity.