Low-temperature growth of vertically aligned In2O3 nanoblades with improved lithium storage properties

Vertically aligned Indium oxide (In2O3) nanoblades are successfully obtained through plasma enhanced chemical vapor deposition (PECVD) approach. By using plasma, the reaction between InCl3 and O2 was able to take place, yielding vertically aligned blade like nanostructure. The novel In2O3 nanostructures exhibit improved electrochemical properties when used as anode materials for lithium-ion batteries. The In2O3 electrode reveals reversible capacity of 580 mAh g−1 after 100 cycles, much higher than that of the In2O3 thin films. The result suggests that proper structural modification of In2O3 thin film may contribute to the improvement of electrochemical properties. The In2O3 electrodes with large reversible capacity and stable cycling performance may provide new insight of anode materials applied in thin film lithium-ion batteries.