Development of a novel microstructure fabrication method with co-axial dual capillary solution flow type droplet cells and electrochemical deposition

A new method for maskless fabrication of metallic patterns or structures on metals is described. A solution flow type droplet cell, with co-axial dual capillaries was applied to form fine metal structures such as strips and rods. This type of droplet cell enables movement of the cell during formation. Nickel fine patterns with a width of about 200 μm were formed on a Cu substrate. The width of the formed pattern does not change with the scanning speed of the cell, but the thickness of the formed pattern changes with the speed. Two different deposition modes were examined to form metal rods, one is a mold free deposition mode and the other is a mold assisted deposition mode. Both modes enable the formation of Ni rods, however, reproducibility of mold free deposition mode was not good. The mold assisted deposition mode has far better the reproducibility, because of the use of the inside wall of the 100 μm diameter inner tube as the mold. It is possible to form nickel micro-rods, about 100 μm in diameter and 12 mm long with relatively smooth surfaces by the mold assisted deposition mode.