Micro machined tactile sensor for soft tissue compliance detection

A micro-machined piezoresistive type tactile sensor (5mm x 6mm), composed of two zigzag structures which act as spring, with 500μm cubic contact mesas at their tips, has been fabricated for detecting compliance of soft tissue. The concept of applying two springs, with considerably different stiffnesses, to soft tissue for compliance detection has been chosen to get output reading independent of the applied pushing distance between the sensor and the tissue. The testing process is done by three ways; by subjecting the sensor to 1-specimen chips with known stiffness, 2-silicone rubber, 3-chicken organs; namely heart, liver and leg.