Vibrational mode and sound radiation of electrostatic speakers using circular and annular diaphragms

This study modeled two diaphragms comprising a pair of indium tin oxide (ITO) transparent plates sandwiching a vibrating diaphragm to create circular (30 mm radius) and annular (30 mm outer and 3 mm inner radius) push–pull electrostatic speakers. We then measured the displacement amplitudes and mode shapes produced by the devices. Vibration characteristics were used to predict sound pressure levels (SPLs) using the lumped parameter method (LPM) and distributed parameter method (DPM). The two measurement results obtained using a laser system were compared to the SPLs obtained using traditional acoustic measurement (AM) from 20 Hz to 20 kHz in order to verify our predictions. When using LPM and DPM, the SPL prediction results in the first three symmetric modes were in good agreement with the AM results. Under the assumption of linear operations, the DPM and amplitude-fluctuation electronic speckle pattern interferometry (ESPI) techniques proved effective in determining the visualization of mode shape (0,1)–(0,3). The use of ITO plates is a practical technique for the prediction of SPL, as well as measurement of mode shapes. The four evaluation methods, i.e. LPM, DPM, ESPI and AM, present a high degree of consistency with regard to vibrational mode and sound radiation characteristics.