Laser beam steering approaches for microstructuring of copper layers

We have investigated the process of copper layer ablation with a tightly focused Q-switched 532 nm laser. Focusing 40 ns long laser pulses to a micrometer-sized spot results in high energy density and gives rise to ablation phenomena not seen during laser processing with larger beam diameters. Use of acousto-optic deflectors (AODs) enabled us to test different laser beam steering approaches in terms of choosing the position for each laser pulse independently of the previous pulses. Random addressing of desired positions across a microstructure proved to be the most efficient method compared to various scanning approaches. Assigning a random order to the spatial sequence of laser pulses resulted in the fastest microstructuring process and featured lowest residual heating of the substrate.