ZnO/ST-Quartz SAW resonator: An efficient NO2 gas sensor

- Indigenously fabricated Surface Acoustic Wave Resonator (99.5 MHz) on ST-Quartz.
- ZnO thin film utilized as sensing layer for NO2 gas detection.
- Room temperature sensing over wide concentration (400 ppb-16 ppm) of NO2 gas.

A Surface Acoustic Wave (SAW) resonator operating at a frequency of 99.50 MHz using piezoelectric ST-cut quartz has been fabricated. The resonator device has been successfully integrated with ZnO sensing layer for detection of NO2 gas. The fabricated sensor device is found to be detecting trace level concentration of NO2 gas (400 ppb to 16 ppm) efficiently and selectively. The ZnO/Quartz SAW sensor is useful for wireless detection of NO2 gas.