کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5016504 | 1465300 | 2017 | 21 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Multistability of cantilever MEMS/NEMS switches induced by electrostatic and surface forces
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی مکانیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
MEMS/NEMS switches are used in a variety of portable electronics and RF telecommunications systems. MEMS/NEMS switches are ideally bi-stable, with one ON and one OFF state and a reliable switching between the two induced by electrical actuation. Presented herein is an exploration into non-ideal behavior, i.e. tri-stability, and parametric sensitivity of a generalization of cantilever MEMS/NEMS switches. The representative system model employs multiphysics features based on Euler-Bernoulli beam theory, parallel plate capacitance for electrostatics, and a Lennard-Jones form of surface interaction. The geometry, material properties, and surface features of the device are condensed into just a few dimensionless quantities, creating a parameter space of low enough dimensionality to provide accessible representations of all system equilibria within physically relevant ranges. Analysis of this system model offers insight regarding conditions necessary for bi- and tri-stability in such systems, which are crucial for informing studies on switching dynamics and various device performance metrics.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Non-Linear Mechanics - Volume 95, October 2017, Pages 209-215
Journal: International Journal of Non-Linear Mechanics - Volume 95, October 2017, Pages 209-215
نویسندگان
Devin Kalafut, Anil Bajaj, Arvind Raman,