کد مقاله کد نشریه سال انتشار مقاله انگلیسی ترجمه فارسی نسخه تمام متن
5144438 1496865 2018 10 صفحه PDF سفارش دهید دانلود کنید
عنوان انگلیسی مقاله ISI
The effects of ultrasonic agitation on supercritical CO2 copper electroplating
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
The effects of ultrasonic agitation on supercritical CO2 copper electroplating
چکیده انگلیسی
Applying ultrasound to the electroplating process can improve mechanical properties and surface roughness of the coating. Supercritical electroplating process can refine grain to improve the surface roughness and hardness. However, so far there is no research combining the above two processes to explore its effect on the coating. This study aims to use ultrasound (42 kHz) in supercritical CO2 (SC-CO2) electroplating process to investigate the effect of ultrasonic powers and supercritical pressures on the properties of copper films. From the results it was clear that higher ultrasonic irradiation resulted in higher current efficiency, grain refinement, higher hardness, better surface roughness and higher internal stress. SEM was also presented to verify the correctness of the measured data. The optimal parameters were set to obtain the deposit at pressure of 2000 psi and ultrasonic irradiation of 0.157 W/cm3. Compared with SC-CO2 electroplating process, the current efficiency can be increased from 77.57% to 93.4%, the grain size decreases from 24.34 nm to 22.45 nm, the hardness increases from 92.87 Hv to 174.18 Hv, and the surface roughness decreases from 0.83 μm to 0.28 μm. Therefore, this study has successfully integrated advantages of ultrasound and SC-CO2 electroplating, and proved that applied ultrasound to SC-CO2 electroplating process can significantly improve the mechanical properties of the coating.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultrasonics Sonochemistry - Volume 40, Part A, January 2018, Pages 147-156
نویسندگان
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