Interlayer composition in Mo-Si multilayers using X-ray photoelectron spectroscopy

Molybdenum-silicon multilayers have been synthesized using electron beam evaporation method. The chemical nature of surfaces and interfaces are probed using a depth profile X-ray photoelectron spectroscopy. X-ray photoelectron spectroscopy results indicate the formation of MoSi2 phase on both the interfaces. The experimental results agree well with predicted results based on solid-state amorphizing reaction, as a result of large heat of mixing. The effective heat of formation model reveals the formation of MoSi2 as the first phase.