Pulsed laser deposited ZnO/ZnO:Li multilayer for blue light emitting diodes

► ZnO, Li doped ZnO (ZLO) and ZnO/ZLO multilayer thin films were fabricated by PLD. ► XRD, AFM and Raman spectrum confirmed the crystallinity and single phase formation. ► Li composition in the film was investigated to be 15 wt% by XPS. ► Optical band gaps of the films were calculated from the transmittance spectrum. ► PL intensity of multilayer was stable and weakly dependent on temperature.