Cu/low-k dielectric TDDB reliability issues for advanced CMOS technologies

With the wide application of low-k and ultra-low-k dielectric materials at the 90 nm technology node and beyond, the long-term reliability of such materials is rapidly becoming a critical challenge for technology qualification. Low-k time-dependent dielectric breakdown (TDDB) is usually considered as one of the most important reliability issues during Cu/low-k technology development because low-k materials generally have weaker intrinsic breakdown strength than traditional SiO2 dielectrics. This problem is further exacerbated by the aggressive shrinking of the interconnect pitch size due to continuous technology scaling. In this paper, three critical issues of low-k TDDB characteristics during low-k development and qualification will be reviewed. In the first part, a low-k TDDB field acceleration model and its determination will be discussed. In the second part, low-k dielectric time-to-breakdown (tBD) statistical distribution and TDDB area scaling law for reliability projection will be examined. In the last part, as low-k TDDB has been found to be sensitive to all aspects of integration, the effects of process variations on low-k TDDB degradation will be demonstrated. Some key aspects which need to be carefully addressed to control overall low-k TDDB performance from process and integration side will be discussed.