کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5466123 | 1517981 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Study of heat induced changes in elastic properties of multilayer Mo/ZrSi2 membranes
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The paper describes a technique for manufacturing of sub-micron metal membranes based on magnetron deposition of multilayer structures. Tensile stress, biaxial elastic modulus and mechanical strength of 25-50Â nm thick multilayer Mo/ZrSi2 membranes were measured, and the behavior of these parameters before and after vacuum heating of samples at the level of heat loads up to 1Â W/cm2 was studied. The elastic properties were obtained from measurements of deformation dependence of the round membranes on the applied pressure differential. A rapid increase in tensile stress of a 25Â nm thick Mo/ZrSi2 film was observed at a uniform heat load of 0.25Â W/cm2 which was probably caused by desorption of water molecules from the membrane surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 631, 1 June 2017, Pages 93-98
Journal: Thin Solid Films - Volume 631, 1 June 2017, Pages 93-98
نویسندگان
N.I. Chkhalo, E.B. Kluenkov, A.Ya. Lopatin, V.I. Luchin, N.N. Salashchenko, L.A. Sjmaenok, N.N. Tsybin,