کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5466154 | 1517982 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of growth conditions on the Al composition and optical properties of AlxGa1Â âxN layers grown by atmospheric-pressure metal organic vapor phase epitaxy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The effect of growth conditions on the Al composition and optical properties of AlxGa1Â âxN layers grown by atmospheric-pressure metal organic vapor phase epitaxy is investigated. The Al content of the samples is varied between 3.0% and 9.3% by changing the gas flow rate of either trimethylaluminum (TMA) or trimethylgallium (TMG) while other growth parameters are kept constant. The optical properties of the AlxGa1Â âxN layers are studied by photoreflectance and time-resolved photoluminescence (TR-PL) spectroscopies. A degeneration in the material quality of the samples is revealed when the Al content is increased by increasing the TMA flow rate. When the TMG flow rate is decreased with a fixed TMA flow rate, the Al content of the AlxGa1Â âxN layers is increased and, furthermore, an improvement in the optical properties corresponding with an increase in the PL decay time is observed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 630, 30 May 2017, Pages 2-6
Journal: Thin Solid Films - Volume 630, 30 May 2017, Pages 2-6
نویسندگان
S. Soltani, M. Bouzidi, Z. Chine, A. Touré, I. Halidou, B. El Jani, M.K. Shakfa,