High-throughput ion beam analysis at imec

We describe the ion beam analysis activities at imec. Rutherford backscattering spectrometry and time of flight-energy (TOF-E) elastic recoil detection analysis are pursued to support the nano-electronics research and development. We outline the experimental set-up and we introduce a new data acquisition software platform. Finally, we illustrate the use of Rutherford backscattering spectrometry to map the thickness of a metallic thin film on a 300 mm Si wafer.