کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5467433 | 1398937 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mass discrimination in elastic recoil detection analysis and its application to Al2O3 on MoS2
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
A time of flight-energy (TOF-E) telescope is often used to detect the scattered and recoiled atoms in elastic recoil detection analysis. The experimental two-dimensional TOF-E histogram may be numerically transformed into a time of flight-mass (TOF-M) histogram. The limited mass resolution in the TOF-M histogram, which results from the limited energy resolution of the energy detector, makes it sometimes difficult to discriminate elements with a small difference in atomic mass. We describe a mass discrimination procedure to numerically discriminate the elements in the TOF-M histogram. The procedure is illustrated on a sample consisting of an Al and a Si layer deposited on a MgO substrate. Besides, we apply the procedure to discriminate Al and Si in a sample consisting of Al2O3 deposited on MoS2/SiO2/Si.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 406, Part A, 1 September 2017, Pages 66-70
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 406, Part A, 1 September 2017, Pages 66-70
نویسندگان
G. Laricchiuta, W. Vandervorst, J. Meersschaut,