کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5468345 | 1518932 | 2017 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Reinforcement role of GaP nanowires in a ZnO layer prepared by RF sputtering
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper presents a thin nanocrystalline ZnO layer with embedded GaP nanowires (NWs). The NWs were grown in vapour-liquid-solid (VLS) mode by metal organic vapour phase epitaxy (MOVPE) at Au seeds formed from a very thin Au layer. The NWs were finally embedded in ZnO using deposition by RF sputtering combined with etching steps that resulted in a compact antireflection layer. We studied properties of such compact NWs structure by means of x-ray diffraction and atomic force microscopy. The study of mechanical properties was performed by nanoindentation measurements. The nanoindentation measurement showed that the incorporation of GaP nanowires into a ZnO layer led to increased hardness compared with that of a pure ZnO layer. The compact GaP NW/ZnO layer structure also exhibited some degree of pseudoelasticity. In addition, the mechanical properties of the compact nanowire layer are sufficiently robust to allow the thermo-compression bonding on the top of the structure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 138, April 2017, Pages 218-223
Journal: Vacuum - Volume 138, April 2017, Pages 218-223
نویسندگان
Jozef Novák, Agáta LaurenÄÃková, Stanislav Hasenohrl, Ivan Novotný, Jaroslav KováÄ, Marian Valentin, Jaroslav Jr.,