Fabrication of none-ridge nanogrooves with large-radius probe on PMMA thin-film using AFM tip-based dynamic plowing lithography approach

Fabrication of none-ridge nanogrooves with large-radius probe on PMMA thin-film using AFM tip-based dynamic plowing lithography approach

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Manufacturing Processes - Volume 29, October 2017, Pages 204-210

Yang He, Yongda Yan, Yanquan Geng, Zhenjiang Hu,