Float characteristics of a squeeze-film air bearing for a linear motion guide using ultrasonic vibration

The float characteristics of a square squeeze-film air bearing using piezoelectric actuators as a vibrator are discussed. In this type of bearing, piezoelectric actuators are adhered to a flat bearing plate and vibrate the bearing plate at ultrasonic resonant frequency. The influence of various design parameters on the float characteristics of the proposed bearing, such as the vibration frequency, input voltage to the piezoelectric actuator, and imposed load were investigated theoretically and experimentally. Our proposed squeeze-film air bearing was found to be quiet, because this type of bearing uses ultrasonic vibration to generate the squeeze-film. An average film thickness of 5 μm could support an imposed load of 10 N.