Fabrication of Si and Ge nanoarrays through graphoepitaxial directed hardmask block copolymer self-assembly

Fabrication of Si and Ge nanoarrays through graphoepitaxial directed hardmask block copolymer self-assembly

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Colloid and Interface Science - Volume 531, 1 December 2018, Pages 533-543

Anushka S. Gangnaik, Tandra Ghoshal, Yordan M. Georgiev, Michael A. Morris, Justin D. Holmes,