کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7133254 | 1461823 | 2018 | 14 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A parametric electrostatic resonator using repulsive force
ترجمه فارسی عنوان
یک رزوناتور الکترواستاتیک پارامتری با استفاده از نیروی انفجاری
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24â¯Î¼m and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. This creates larger, stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 277, 1 July 2018, Pages 134-141
Journal: Sensors and Actuators A: Physical - Volume 277, 1 July 2018, Pages 134-141
نویسندگان
Mark Pallay, Shahrzad Towfighian,