High-reflectivity electromagnetic two-axis microscanner using dielectric multi-layer reflective surface

A high-reflectivity electromagnetic two-axis microscanner is presented, which uses dielectric multi-layer coating on the aluminum film at the reflective surface. The microscanner is driven biaxially with the torque generated between the radially directed magnetic field and the current path through a single-turn copper coil patterned on the scanner. To enhance reflectivity, dielectric multi-layers of Al2O3 and TiO2 films are coated on the aluminum reflective surface of the mirror. A reflectance of 96.31% was obtained by using two pairs of dielectric films at a wavelength of 850 nm. Laser irradiation tests were performed to measure the operational reliability of the microscanner. The temporal drift of the optical scan angle for the mirror with two pairs of dielectric layers was measured to be 0.16° during a 6-h operation using a femtosecond pulsed laser irradiation with an average power of 2.3 W and a high repetition rate of 80 MHz. However, for the mirror where the reflection surface was coated with an aluminum layer only, a 1.74° degradation of the tilting angle was observed.