Diagnosis of gas fluctuations of aerostatic guideway

In order to diagnosis the gas fluctuations of aerostatic guideways, the calculation equation of stiffness of aerostatic guideway with double row orifice has been derived by gas lubrication theory. For the stiffness coupling structure of guideway and unloading guideway, the frequency of whole slides in machining direction with gas thickness has been derived by dynamic model. Wavelet transform as a means to process the measured signal of workpeice surface, the frequency characteristics of gas fluctuation of aerostatic guideways has been extracted out from measured signal, the errors of guideway system have been diagnosed according to power spectral density (PSD), this provide a basis for the diagnosis of machine tool error.