Laser treatment of Si–Al2O3 two-layer target

The laser treatment of two-layer Si–Al2O3 target at λ=1064 nm and P=170 W in a N2+O2 atmosphere by electron microscopy, atomic force microscopy, X-ray microanalysis, and IR-spectroscopy was investigated. It is established that in the stage of fracture of a silicon plate, the ablation products were silicon clusters into which, when passing over, oxygen and nitrogen diffused. On collective plate, a SiOxN composite film formed. In the stage of fracture of an alumina plate, the oxidation of silicon in the channel zone and the interaction of Al and Si oxides, accompanied by their nitration, occurred. In this stage, evolved oxide vapors and ejected mullite drops deposit on the SiOxN film. On collective plate, mullite nanowhiskers grew from mullite drops by the vapor–liquid–solid body mechanism.